Physical limitations in ferromagnetic inductively coupled plasma sources
نویسندگان
چکیده
منابع مشابه
Miniaturization of Inductively Coupled Plasma Sources
The scaling laws associated with the miniaturization of planar inductively coupled plasmas (ICPs) are investigated. The applications for miniature ICPs include microelectromechanical systems (MEMS) for chemical analysis. Langmuir probe and microwave interferometry measurements of three ICPs with coil diameters of 5, 10, and 15 mm show that electron density typically falls in the range of 10 10 ...
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2013
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.4793280